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Tool
KLA Tencor P11 Surface Profiler
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Tool Details
Brand
KLA Tencor
Model
P11 Surface Profiler
Description
Measurements of different surface characteristics such as: roughness, waviness, step heights,….
Serial Number
04970190
Wafersize
Year of Manufacture
Location
Dresden
More Details
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File Name
Action
1
LKLA Tencor P11.pdf
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